Thomas W. Nowak

Structural evolution of nano-porous ultra-low-k dielectrics under broadband UV curing.
Advanced Metallization Conference 2007, Proceedings, October 9-11, 2007 in Tokyo, Japan,
October 22-24, 2007 in New York, NY, United States, 2007 (2008), Meeting Date 2007, 507-511.

A lithographic and process assessment of photoresist stabilization for double-patterning using 172-nm photoresist curing.
Proceedings of SPIE (2008), 6923(Pt. 1, Advances in Resist Materials and Processing Technology XXV), 692321-692321-8.

Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation.
U.S. Pat. Appl. Publ. (2007), 38pp., Cont.-in-part of U.S. Ser. No. 124,908.

UV curing systems for reducing thermal hysteresis of chemical vapor-deposited dielectric films. Jpn. Kokai Tokkyo Koho (2007), 49pp.

Enhancement of remote plasma source clean for dielectric films. PCT Int. Appl. (2007), 29pp. .

Use of hydrophobic interaction chromatography for the attenuation of viruses. PCT Int. Appl. (2007), 16pp.

Novel method for viral load reduction in biologics. PCT Int. Appl. (2007), 8pp.

Tandem UV chamber for curing dielectric materials for semiconductor devices. U.S. Pat. Appl. Publ. (2006), 14pp.

Structural Insights into the Mechanism of PEPCK Catalysis.
Biochemistry (2006), 45(27), 8254-8263.

High-power dielectric seasoning for stable wafer-to-wafer thickness uniformity of dielectric CVD films.
U.S. Pat. Appl. Publ. (2006), 10 pp.

Method to reduce plasma damage during cleaning of semiconductor wafer processing chamber.
PCT Int. Appl. (2006), 12 pp.

Method for the thermal treatment of pharmaceutical preparations containing fibrinogen using ammonium salts or amines.
PCT Int. Appl. (2006), 39 pp.

Heated gas box for PECVD applications. U.S. Pat. Appl. Publ. (2006), 11 pp.

Numerical simulation of reactive processes in an experiment with partially saturated bentonite.
Journal of Contaminant Hydrology (2006), 83(1-2), 122-147.

Consensus recommendations for gastric emptying scintigraphy: a joint report of the
American Neurogastroenterology and Motility Society and the Society of Nuclear Medicine.
Journal of nuclear medicine technology (2008), 36(1), 44-54.

Consensus recommendations for gastric emptying scintigraphy: a joint report of the
American Neurogastroenterology and Motility Society and the Society of Nuclear Medicine.
The American journal of gastroenterology (2008), 103(3), 753-63.

 

Posted 07/24/2008